Micromanufacturing
by Ehmann, Kornel F.; Bourell, David; Culpepper, Martin L.; Hodgson, Thom J.; Kurfess, Thomas R.Rent Textbook
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Summary
Table of Contents
| Foreword | p. xi |
| Preface | p. xiii |
| List of Figures | p. xvii |
| List of Tables | p. xxi |
| Executive Summary | p. xxiii |
| Introduction | |
| Background and Scope | p. 1 |
| Methodology | p. 4 |
| Overview of Report | p. 8 |
| Format of Report | p. 9 |
| Acknowledgements | p. 9 |
| Design | |
| Abstract | p. 11 |
| The Approach Taken to Assess the State-of-the-Art in NLBMM Design | p. 12 |
| Unique Requirements for the Design of NLBMM Parts, Processes and Equipment | p. 12 |
| The Design Process and the Important Elements of Design of/for NLBMM Products | p. 15 |
| The State-of-the-Art and Gaps between Existing and Required Capabilities | p. 18 |
| Summary and Conclusions | p. 26 |
| References | p. 27 |
| Materials | |
| Abstract | p. 29 |
| Materials for Micromanufacturing | p. 29 |
| Materials Issues in Micromanufacturing | p. 44 |
| Summary and Conclusions | p. 50 |
| References | p. 51 |
| Processes | |
| Abstract | p. 53 |
| Micromanufacturing Processes and Equipment | p. 53 |
| Micromanufacturing Issues | p. 80 |
| Summary and Conclusions | p. 84 |
| References | p. 85 |
| Metrology, Sensors and Control | |
| Abstract | p. 89 |
| Introduction | p. 90 |
| Summary and Conclusions | p. 108 |
| References | p. 108 |
| Non-lithography Applications | |
| Abstract | p. 111 |
| Applications of Non-lithography Machining | p. 113 |
| Flexible Manufacturing and Desktop Manufacturing | p. 116 |
| MEMS Foundry | p. 118 |
| Summary | p. 119 |
| References | p. 120 |
| Business, Education, the Environment, and Other Issues | |
| Abstract | p. 121 |
| Business | p. 121 |
| Education | p. 123 |
| Environment | p. 125 |
| Government Policies | p. 126 |
| Appendices | |
| Panelist Biographies | p. 131 |
| Questionnaire for Site Visits | p. 136 |
| Site Reports-Asia | |
| National Institute of Advanced Industrial Science and Technology | p. 141 |
| Asia Pacific Microsystems, Inc. (APM) | p. 146 |
| FANUC, FA & Robot | p. 148 |
| Hitachi Chemical R&D Center in Tsukuba | p. 153 |
| ITRI - Mechanical Industry Research Laboratories (MIRL) | p. 156 |
| ITRI - Nano Technology Research Center (NTRC) | p. 160 |
| Instrument Technology Research Center (ITRC) | p. 163 |
| Korean Advanced Institute of Science and Technology (KAIST) | p. 168 |
| Korean Institute of Machinery and Materials (KIMM) | p. 175 |
| Kyocera Corporation | p. 179 |
| Kyoto University | p. 184 |
| Matsuura Machinery Corporation | p. 187 |
| Metal Industries Research and Development Centre (MIRDC) | p. 189 |
| Mitsubishi Electric Corporation (MEC) | p. 193 |
| Nagoya University - Center for Cooperative Research in Advanced Science and Technology | p. 198 |
| Nagoya University - Laboratory of Structure and Morphology Control | p. 200 |
| Nagoya University - Department of Micro System Engineering | p. 202 |
| National Cheng Kung University | p. 207 |
| National Science Council | p. 212 |
| National Taiwan University | p. 215 |
| Olympus Corporate R&D Center | p. 220 |
| RIKEN (The Institute of Physical & Chemical Research) | p. 223 |
| Samsung Electro Mechanics Corp., R&D Center | p. 228 |
| Sankyo Seiki | p. 231 |
| Sansyu Finetool Co., Ltd | p. 234 |
| Seiko Instruments Inc. (SII) | p. 238 |
| Seoul National University | p. 243 |
| University of Electro Communications | p. 245 |
| University of Tokyo | p. 248 |
| I. I. S., The University of Tokyo | p. 251 |
| Yonsei University | p. 255 |
| Site Reports-Europe | |
| Basel World | p. 260 |
| Robert Bosch, GmbH | p. 264 |
| École Polytechnique Fédérale de Lausanne (EPFL) | p. 267 |
| Fraunhofer Institute - Manufacturing Engineering and Automation | p. 271 |
| Fraunhofer Institute - Production Systems and Design Technology | p. 276 |
| Fraunhofer Institute - Production and Laser Technology | p. 284 |
| Fraunhofer Institute - Reliability and Microintegration | p. 296 |
| Karlsruhe Research Center | p. 302 |
| Klocke Nanotechnik | p. 307 |
| Kugler GmbH | p. 313 |
| Laser Zentrum Hannover e. V | p. 318 |
| Institut für Mikrotechnik Mainz GmbH (IMM) | p. 322 |
| Philips Center for Industrial Technology (CFT) | p. 329 |
| Swiss Federal Institute of Technology - Zurich (ETHZ) | p. 333 |
| Technical University of Eindhoven | p. 339 |
| Carl Zeiss Industrielle Messtechnik, GmbH | p. 342 |
| Zumtobel | p. 347 |
| Glossary | p. 352 |
| Table of Contents provided by Ingram. All Rights Reserved. |
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