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Summary

This international technology assessment study has focused on the emerging global trend toward the miniaturization of manufacturing processes, equipment and systems for microscale components and products, i.e., "Small Equipment for Small Parts". It encompasses the creation of miniaturized units or hybrid processes integrated with metrology, material handling and assembly to create microfactories capable of producing microprecision products in a fully automated manner at low cost. The study has investigated both the state-of-the-art as well as emerging technologies from the scientific, technological, and commercialization perspectives across key industrial sectors in the U.S., Asia and Europe including medical, electronics, aerospace, and consumer products. This study does NOT include the lithographic-based processes common to the microelectromechanical systems (MEMS) community. While the U.S. gets high marks for nanotechnology R&D, emphasis in the U.S. on micromanufacturing R&D is lagging behind the rest of the world, particularly in technology transfer and ongoing development. This will undoubtedly have serious long-term implications, since it is well-recognized that micromanufacturing will be a critical enabling technology in bridging the gap between nanoscience and technology developments and their realization in useful products and processes. While examples do exist where U.S. government programs are focused squarely on industry-university-government collaboration, the scale of efforts both in Asia and Europe is significantly larger. On this latter point, Europe appears to be very strong, particularly as these partnerships work to refine and fine-tune developments for industry adaptation and commercialization.

Table of Contents

Forewordp. xi
Prefacep. xiii
List of Figuresp. xvii
List of Tablesp. xxi
Executive Summaryp. xxiii
Introduction
Background and Scopep. 1
Methodologyp. 4
Overview of Reportp. 8
Format of Reportp. 9
Acknowledgementsp. 9
Design
Abstractp. 11
The Approach Taken to Assess the State-of-the-Art in NLBMM Designp. 12
Unique Requirements for the Design of NLBMM Parts, Processes and Equipmentp. 12
The Design Process and the Important Elements of Design of/for NLBMM Productsp. 15
The State-of-the-Art and Gaps between Existing and Required Capabilitiesp. 18
Summary and Conclusionsp. 26
Referencesp. 27
Materials
Abstractp. 29
Materials for Micromanufacturingp. 29
Materials Issues in Micromanufacturingp. 44
Summary and Conclusionsp. 50
Referencesp. 51
Processes
Abstractp. 53
Micromanufacturing Processes and Equipmentp. 53
Micromanufacturing Issuesp. 80
Summary and Conclusionsp. 84
Referencesp. 85
Metrology, Sensors and Control
Abstractp. 89
Introductionp. 90
Summary and Conclusionsp. 108
Referencesp. 108
Non-lithography Applications
Abstractp. 111
Applications of Non-lithography Machiningp. 113
Flexible Manufacturing and Desktop Manufacturingp. 116
MEMS Foundryp. 118
Summaryp. 119
Referencesp. 120
Business, Education, the Environment, and Other Issues
Abstractp. 121
Businessp. 121
Educationp. 123
Environmentp. 125
Government Policiesp. 126
Appendices
Panelist Biographiesp. 131
Questionnaire for Site Visitsp. 136
Site Reports-Asia
National Institute of Advanced Industrial Science and Technologyp. 141
Asia Pacific Microsystems, Inc. (APM)p. 146
FANUC, FA & Robotp. 148
Hitachi Chemical R&D Center in Tsukubap. 153
ITRI - Mechanical Industry Research Laboratories (MIRL)p. 156
ITRI - Nano Technology Research Center (NTRC)p. 160
Instrument Technology Research Center (ITRC)p. 163
Korean Advanced Institute of Science and Technology (KAIST)p. 168
Korean Institute of Machinery and Materials (KIMM)p. 175
Kyocera Corporationp. 179
Kyoto Universityp. 184
Matsuura Machinery Corporationp. 187
Metal Industries Research and Development Centre (MIRDC)p. 189
Mitsubishi Electric Corporation (MEC)p. 193
Nagoya University - Center for Cooperative Research in Advanced Science and Technologyp. 198
Nagoya University - Laboratory of Structure and Morphology Controlp. 200
Nagoya University - Department of Micro System Engineeringp. 202
National Cheng Kung Universityp. 207
National Science Councilp. 212
National Taiwan Universityp. 215
Olympus Corporate R&D Centerp. 220
RIKEN (The Institute of Physical & Chemical Research)p. 223
Samsung Electro Mechanics Corp., R&D Centerp. 228
Sankyo Seikip. 231
Sansyu Finetool Co., Ltdp. 234
Seiko Instruments Inc. (SII)p. 238
Seoul National Universityp. 243
University of Electro Communicationsp. 245
University of Tokyop. 248
I. I. S., The University of Tokyop. 251
Yonsei Universityp. 255
Site Reports-Europe
Basel Worldp. 260
Robert Bosch, GmbHp. 264
École Polytechnique Fédérale de Lausanne (EPFL)p. 267
Fraunhofer Institute - Manufacturing Engineering and Automationp. 271
Fraunhofer Institute - Production Systems and Design Technologyp. 276
Fraunhofer Institute - Production and Laser Technologyp. 284
Fraunhofer Institute - Reliability and Microintegrationp. 296
Karlsruhe Research Centerp. 302
Klocke Nanotechnikp. 307
Kugler GmbHp. 313
Laser Zentrum Hannover e. Vp. 318
Institut für Mikrotechnik Mainz GmbH (IMM)p. 322
Philips Center for Industrial Technology (CFT)p. 329
Swiss Federal Institute of Technology - Zurich (ETHZ)p. 333
Technical University of Eindhovenp. 339
Carl Zeiss Industrielle Messtechnik, GmbHp. 342
Zumtobelp. 347
Glossaryp. 352
Table of Contents provided by Ingram. All Rights Reserved.

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